Committees
President of KSDT
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Prof.
Jea-Gun ParkHanyang Univ., Korea
General Chair
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Prof.
Hyeongtag JeonHanyang Univ., Korea
Organizing Chair
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Prof.
Jinsub ParkHanyang Univ., Korea
1. Nano Thin Film Deposition
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Prof. Se Hun Kwon
Pusan Nat'l Univ., Korea
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Prof. Woo Hee Kim
Hanyang Univ., Korea
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Prof. Yukihiro Shimogaki
The Univ. of Tokyo, Japan
2. CMP & Cleaning
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Prof. Tae-Dong Kim
Hannam Univ., Korea
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Prof. Sangwoo Lim
Yonsei Univ., Korea
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Prof. Jihoon Seo
Clarkson Univ., USA
3. Advanced Etching Technology
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Prof. Heeyeop Chae
Sungkyunkwan Univ., Korea
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Prof. Chin-Wook Chung
Hanyang Univ., Korea
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Prof. Daisuke Ogawa
Chubu Univ., Japan
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Prof. Steven Shannon
NC State Univ., USA
4. Advanced Lithography
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Prof. Myung-Ki Kim
Korea Univ., Korea
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Prof. Jong-Rak Park
Chosun Univ., Korea
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Research Fellow, Jeonglim Nam
Hanyang Univ., Korea
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Dr. Youssef Drissi
imec, Belgium
5. Post Fabrication Technology and System Packaging
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Prof. Gu-Sung Kim
Kangnam Univ., Korea
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Prof. Changhwan Choi
Hanyang Univ., Korea
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Dr. Takao Enomoto
Rapidus Inc., Japan
6. Frontier Metrology, Diagnosis, and Modeling for Nanoscale IC Integration and Emerging Device Process
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Prof. Hyungtak Seo
Ajou Univ., Korea
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Prof. Tae-Hun Shim
Hanyang Univ., Korea
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Dr. Byoung-Ho Lee
Hitachi-hightech, Korea
7. Power Device
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Prof. Ho-jun Lee
Pusan Nat'l Univ., Korea
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Prof. Ogyun Seok
Pusan Nat'l Univ., Korea
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Dr. Jang-Kwon Lim
Research Institute of Sweden AB, Sweden
8. Carbon Neutrality in Semiconductor Industry
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Prof. Hankwon Lim
UNIST, Korea
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Prof. Hongsik Jeong
UNIST, Korea
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Prof. Youngkook Kwon
UNIST, Korea
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Prof. Boreum Lee
Chonnam Nat'l Univ., Korea